Diffusion Coefficient of Hydrogen in Palladium Films Prepared by RF Sputtering

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Diffusion coefficients of hydrogen in the palladium films of α-phase have been measured between 278 and 323 K by an electrochemical stripping method. Palladium films were deposited on iron by RF sputtering. The values of the diffusion coefficient of hydrogen obtained for the film specimens 0.68 μm and 1.36 μm in thickness were about 2 orders of magnitude lower than those reported for the bulk specimens in the literature, and the temperature dependence of the diffusion coefficients of hydrogen was given by D_H(m²⁄s)=4.16×10⁻⁹exp(−25.7(kJ/mol)⁄RT).