In recent years, energy saving resources are required in petrochemical field, and attention has been focused on membrane separation process. Significant energy saving can be expected by applying zeolite membranes to distillation process. Zeolite membrane is formed on a porous ceramic substrate such as α- alumina. The separation layer in principle is a zeolite thin film, but in practice separation potential is also controlled by the properties of substrate. In order to improve the performance of zeolite membranes, it is therefore important to understand the influence of the porous ceramic substrates in the zeolite membrane structure as well as in the final properties of membrane.