Abstract
Ellipsometric porosimetry (EP) can elucidate physisorption isotherms with sampling weights of several µ g, while conventional porosimetries based on both volumetric and gravimetric adsorption techniques require sampling weights in the mg-order range. This enables EP to be a powerful tool for evaluating the size distribution of subnano/nano-scaled pores for functional thin materials. This paper describes the principle and method for EP, and also demonstrates examples of its application to the characterization of the porosity of thin films achieved using the flowtype EP at AIST.
