抄録
Sol–gel derived amorphous silica membranes are reviewed in terms of control of network structure for the development of highly permeable gas separation membranes. Metal doping such as palladium and fluorine, as well as spacer method utilizing bridged alkoxide with organic groups between 2 Si atoms, are introduced. Gas permeation properties for amorphous silica membranes were quantitatively evaluated by modified gas translation (GT) model. Pore size determination with the temperature dependence of gas permeances was also introduced, and quantitatively discussed the effect of Si precursor on silica network size and small gas permeation properties.