“SOKKEN” NICKEL MESH FILTER FOR THE MEASUREMENT OF HIGH PRECISION FILTRATION MODEL SCF-NM-_??_

Abstract

“SOKKEN” Model SCF-NM-_??_s, nicke mesh filters, are porous thin metal membranes produced by a combined technology of photo-resist processing and highly advanced nickel plating, manufactured by Dainippon Printing and standardized by Tsukasa Sokken. We specified that the filter should have a diameter of 13mm, a thickness of 11μm, pore diameters of 2.9 to 5.4μm, the inter-pore distance of 35μm, and a pore number of about 55, 600. We determined the effective pore diameter of the filters with an accuracy of the order of 0.01μm, using pressure-flow rate relationships of airflow.