Proceedings of Microelectronics Symposium
Online ISSN : 2434-396X
MES2017
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Host: Japan Institute of Electronics Packaging

MES2017
Investigation of distribution of residual Stress by Micro-Raman imaging on 4H-SiC in contact with the electrode at high temperature
*[in Japanese], [in Japanese], [in Japanese], [in Japanese]
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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 239-242

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© 2017 The Japan Institute of Electronics Packaging
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