Proceedings of Microelectronics Symposium
Online ISSN : 2434-396X
MES2020
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MES2020
Surface condition of ITO electrode by oxygen annealing and deterioration characteristics of (Pb,La)(Zr,Ti)O3 capacitor
*[in Japanese][in Japanese][in Japanese]
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Pages 209-212

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© 2020 The Japan Institute of Electronics Packaging
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