マイクロメカトロニクス
Online ISSN : 2432-0358
Print ISSN : 1343-8565
ISSN-L : 1343-8565
複合共振器レーザの機械的負帰還制御による微小力計測
片桐 祥雅板生 清
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ジャーナル フリー

1998 年 42 巻 2 号 p. 30-43

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抄録
A small displacement sensor in a coupled-cavity laser configuration formed with amoving extemal mirror ispresented to dynamically measure small forces. The sensor provides high sensitivity with a minimum detectable displacement of 0.8 nm independently of the lasing wavelength, while the lasingstate is mechanically stabilized by anegative feedback loop to maintain a constant external cavity length. We show that this sensor is of great use fordetecting extremely small distortion of a stiff cantilever, reflecting transient variations of small friction forces in mechanical systems.
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© 1998 一般社団法人 日本時計学会
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