Micromechatronics
Online ISSN : 2432-0358
Print ISSN : 1343-8565
ISSN-L : 1343-8565
Analysis of Vibration of AT-cut Quartz Plates Using Three Dimensional FEM
Satoshi AKUTSUSinichi WATANABEMitsuo NAKAZAWA
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1999 Volume 43 Issue 2 Pages 50-55

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Abstract
We calculated the resonant frequencies and the Vibration Mode of rectangular AT-cut Quartz Plates using C. LANCZOS Method. The calculated value agrees with the experimental value by NAKAZAWA. Further, we calculated the Displacement of Electroded 20MHz AT-cut Quartz Plates. We make it clear that the Three Dimensional FEM is accurate enough for practical usage in the range of high frequency.
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© 1999 The Horological Institute of Japan
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