Abstract
Solid state batteries fabricated by thin film technology are receiving attention as micro-batteries. We fabricated rechargeable thin film lithium batteries with Li_2O-V_2O_5-SiO_2 film as their solid electrolyte and with LiMn_2O_4 film as the cathode active material and examined their cell performance. The discharge capacity of Li/LiMn_2O_4 battery was 40 μ Ah/cm^2μm, and the energy density was 160 μ Wh/cm^2μm.