マイクロメカトロニクス
Online ISSN : 2432-0358
Print ISSN : 1343-8565
ISSN-L : 1343-8565
電極膜厚を考慮した水晶音さの研究
中澤 光男阿久津 哲
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ジャーナル フリー

1999 年 43 巻 4 号 p. 31-35

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A reliable quadric formula for frequency turn-over temperatures versus electrode film thicknesses in quarts crystal tuning forks was proposed and the coefficients were determined by the least squares method using the experimental results of 32-kHz and 76-kHz tuning forks. And a new analysis for the Young's modulus of the electrode film was also proposed using a bar flexural vibration frequency equation. It was found that the mass loading theory could not explain the frequency turn-over temperature characteristics versus electrode film thicknesses for quartz crystal tuning forks, while this theory could well explain the experimental results of tuning forks.
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© 1999 一般社団法人 日本時計学会
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