抄録
This paper describes a new device for measuring three dimensional surface profile based on a grating pattern projection method by using a phase shifting technique. A grating that is a key component in this device is made by liquid crystal device (LCD). The LCD has a stripe shape grating pattern with high aperture and is driven by the static drive system. This LCD grating can make sinusoidal light intensity distribution with highly gray levels, and increase the measurement resolution by reducing the optical noise delived from the LCD grating. The height resolution of ±100μm could be achieved.
