Micromechatronics
Online ISSN : 2432-0358
Print ISSN : 1343-8565
ISSN-L : 1343-8565
Displacement Characteristics of One-piece XYZ Table with Magnifying Lever for Fine Positioning
Yasuo YoshimuraKoh Yee YongYoshihiro UeHajime Takahashi
Author information
JOURNAL FREE ACCESS

2001 Volume 45 Issue 2 Pages 63-74

Details
Abstract
Tables such as what we call X, XY and XYZ-table play an important role of fine positioning for equipments like optical microscope, three, dimensional measuring machine, semiconductor-producing machine and so on. This paper states mainly on the design of the one-piece XYZ table with levers for magnifying input displacements, and states the performances, that is, interferential ratios among three axes and magnifying efficiency.
Content from these authors
© 2001 The Horological Institute of Japan
Previous article Next article
feedback
Top