Abstract
In this paper we present a new type AFM・FFM instrument designed, drawn, and constructed this by ourselves. The demands for measuring super finished surfaces are increasing in my faculty very much, however it is said that the commercial AFM costs as much as \30,000,000 or more. We have determined to develop the AFM・FFM together in 1997 and we have found out its principle, mechanism, electrical circuits and experimental data. We have newly applied the kinematic mounting in this in instrument which is supporting and adjusting samples to be measured. A circuit consisting of a position sensitive detector(PSD), and an integral circuit for data summation are manufactured and an optical lever method is applied for small amount of Si_3N_4 cantilever displacement detection. We have succeeded in measuring a Si grating pattern, compact disc surfaces, artificial sapphire surfaces coated by Al_2O_3.
