Effect of H₂ Gas Addition on Electrical and Optical Characteristics of RF Capacitive Atmospheric Pressure Non-equilibrium Argon Plasma Jet

Abstract

In this study, we investigated the effects of H₂ gas addition on electrical and optical properties of a RF capacitive atmospheric pressure non-equilibrium Ar plasma jet. It was found that the discharge behavior of the plasma jet was scarcely changed with the addition of H₂ gas. However, the discharge current decreased when trace of H₂ gas was added into the Ar plasma jet. In respect of optical emission spectrum (OES), the emission intensities of excited Ar atoms increased significantly after the addition of trace of H₂ gas. On the contrary, an expected quenching effect of H₂ gas was not observed. Based on the electrical and optical characterizations, chemical reactions in Ar-H₂ plasma jet were proposed.