Published: July 30, 1999Received: November 02, 1998Available on J-STAGE: April 19, 2011Accepted: February 02, 1999
Advance online publication: -
Revised: -
The SAICAS method was applied for the measurement of the adhesive strength of the thin film with one-micrometer thickness. The film setting by vacuum- staging and the accurate alignment of blade to the film surface were found to be essential for the quantitative estimation of the adhesion force.
