Secondary Ion Mass Spectrometry
1997 Volume 34 Issue 6 Pages 397-407
Details
1997 Volume 34 Issue 6 Pages 397-407
Secondary Ion Mass Spectrometry (SIMS) has been regarded as one of the most sensitive techniques for the surface analysis. In this review article, general explanation is presented with respect to the principle of the measurement and the typical information of this technique. Special emphases are laid on the effective usage of SIMS in the field of organic material when used as Time of Flight SIMS (TOF-SIMS). In addition, some examples are given for typical usage of SIMS, especially for the evaluation of polymer surface by using TOF-SIMS.
