A New O₂ Gas Selective Permeable Membrane Prepared by the Reactive Sputtering with SnO₂ Target

Abstract

A unique membrane was developed by the reactive sputtering of a SnO₂ on a microporous Nucleopore film in an Ar-CH₄ atmosphere. The prepared membrane showed good oxygen permeation while preventing the permeation of water vapor. The gas permeability ratio (JO₂/J_H2O) of the typical membrane with the thickness of 0.1∼0.4μm is about 20. The service life of the zinc-air cell is improved remarkably by the application of the thin SnO₂ film as the O₂ permeation membrane.