MOCVD原料としての高純度[Sr(dpm)2]の合成

抄録

A dipivaroylmethane (Hdpm) chelate of strontium(II), Sr(dpm)2, was synthesized by the reaction of strontium metal with Hdpm in anhydrous benzene under a highly pure argon atmosphere and characterized by means of ICP, elemental analyses, FT-IR, 1I-I-NMR, "CNMR, and TG-DTA. The product was proved to be sufficiently pure so as to be used as a good source of MOCVD for the preparation of SrTiO3 thin films.