Absolute Positioning of Scanning Probe Microscope Tip by Two-Wavelength Synthetic Method

抄録

In this paper, we describe the absolute positioning of a probe tip in a scanning Wiener fringe optical microscope (SWOM) using a synthetic wavelength method. Two laser beams with different wavelengths are superimposed and are incident on a sample surface. A synthetic fringe which has a longer period than that of the Wiener fringe obtained with a single wavelength is formed on the surface. The order of Wiener fringe which is utilized as a feedback signal in the microscope can be determined by the synthetic fringe. A sample with known structure was observed for various defined fringe orders using the SWOM.