Interferometry for Measuring Large Aspherical Surfaces with Holographic Optical Elements

Abstract

Interferometry for measuring the shape of large aspherical surfaces is reported. The interference fringe pattern between the parallel reference beam and the reconstructed wavefront from the master zone plate which is drawn by an electron-beam drawing machine is recorded on a hologram plate with off-axis optical arrangement. The hologram plate used as the standard element is reconstructed by the conjugate beam in a modified Twyman-Green interferometer. Insufficient parallelism of commercial hologram plates can be compensated by this method. It is also easy to make replicas. Some experimental results are also presented.