Zone-Plate Interferometer for Measuring the shape Error of Mirrors with Large Numerical Aperture and Step Asphericity
Released on J-STAGE: March 28, 2000 |
Volume 3
Issue 1
Pages 34-37
Takashi NOMURA, Kazuhide KAMIYA, Hiroshi MIYASHIRO, Hatsuzo TASHIRO, Kazuo YOSHIKAWA