Hybrid Measurement System Including Optical Heterodyne and Laser Microscopy Functions Using an Acoustooptic Deflector

Abstract

The construction of a hybrid measurement system for measuring lateral and vertical dimensions and its applications to industrial inspection are described. This system uses an acoustooptic deflector, and includes optical heterodyne, confocal and non confocal laser scan microscopy functions in one and the same optical device. These functions are used individually or collectively depending on the purpose of the measurement. For example, by using the optical heterodyne and non confocal microscopy functions at the same time, lateral and vertical dimensions can be measured simultaneously.