Oyo Buturi
Online ISSN : 2188-2290
Print ISSN : 0369-8009
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Scanning probe techniques for micro/nano fabrication tools
Futoshi IWATAAkira SASAKI
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2004 Volume 73 Issue 4 Pages 490-493

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Abstract

Scanning probe microscopes (SPMs) have been developed not only for surface observation but also for surface fabrication at nanometer-scale resolution.In this article, we describe novel probe techniques for nanometer-scale fabrications utilizing various local interactions between probes and surfaces.Ultrasonic scratching could be effectively applied to the mechanical fabrication of polymers and biomaterials.Micropipette probes filled with various liquids were employed for local chemical fabrication.A metalized probe was utilized for the near-field optical fabrication of photosensitive polymer.A current-sensing near-field optical probe was developed for inducing local coloration and bleaching modifications of electrochromic materials by electrochemical reactions.

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© 2004 The Japan Society of Applied Physics
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