Advanced electron microscopy for integrated local analysis

Abstract

Transmission electron microscopy plays an important key role in the microstructural analysis of materials, and the recent development of a spherical-aberration corrector makes it possible to achieve resolution approaching the sub-Å scale. We describe a state-of-the-art electron microscopy by focusing on scanning transmission electron microscopy (STEM), which provides incoherent Z-contrast atomic images, energy-dispersive x-ray spectroscopy (EDS) and electron energy-loss spectroscopy (EELS) at the same local region even at sub-nanometer scale.