Novel SIMS techniques for organic and biological materials with high-density excited primary ion beams

Abstract

The recent progress of organic SIMS with new primary ion beams is overviewed. Both the molecular depth profiling of an organic multilayer and high-resolution molecular imaging have been demonstrated using cluster ions or swift heavy ions, which provide high density excitation on surfaces. These new SIMS techniques lead to advances in new functional polymer synthesis, molecular electronics, biological materials and life science.