Surface analysis by medium energy ion scattering spectroscopy

Abstract

Medium energy ion scattering spectroscopy (MEIS) is a powerful tool for quantitatively analyzing surfaces and interfaces with excellent depth resolution. It has also been shown that high-resolution MEIS makes it possible to determine the shape and size of nanoparticles including core/shell particles. In this article, we introduce some typical examples of the high-resolution MEIS analysis, such as (i) high-κ thin films, (ii) an ordered Al₂O_x layer grown on NiAl(110), (iii) Au nanoparticles supported on SrTiO₃(001) and Au(core)/Pd(shell) structures with a size below 5 nm, which cannot be observed clearly using a conventional transmission electron microscope.