Development of a soft X-ray flat-field spectrograph in the 50-4000 eV range and its application to electron microscopes

Abstract

We have developed a flat-field spectrograph capable of detecting soft X-ray emissions in the 50-4000 eV range with high spectral resolution. The spectrograph used in combination with an electron microscope makes it possible to determine not only the crystal structure of materials in the nanoscale range, but also the chemical-bonding states. In this article, we describe the details of the flat-field spectrograph, and preliminary experimental results measured by the spectrographs installed in an electron probe micro-analyzer (EPMA) and transmission electron microscope (TEM).