Oyo Buturi
Online ISSN : 2188-2290
Print ISSN : 0369-8009
Tutorial
Current status and challenges of emerging ferroelectric-HfO2 based memory devices
Masaharu KOBAYASHI
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JOURNAL FREE ACCESS

2020 Volume 89 Issue 6 Pages 314-320

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Abstract

For the move toward the next generation of computing, which will enable IoT and AI technologies, high-speed, high-capacity and low-power memory will be needed more than ever before. Recently, ferroelectricity has been discovered in a very common material, HfO2, which is already used in the CMOS process. Ferroelectric-HfO2 is attracting a lot of attention for memory device applications. What is so different from conventional ferroelectric materials? What opportunities will ferroelectric-HfO2 give us? In this report, I will describe the impact of ferroelectric-HfO2 on device society and then I will explain the current status and challenges of ferroelectric-HfO2 memory devices.

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© 2020 The Japan Society of Applied Physics
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