Oyo Buturi
Online ISSN : 2188-2290
Print ISSN : 0369-8009
Cross Sectional Observation of Layered Thin Film Structure by Transmission Electron Microscopy
Hiroshi TAKAI, Tadatsugu ITOH
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1984 Volume 53 Issue 8 Pages 723-726

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[in Japanese]
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© The Japan Society of Applied Physics
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