Precision cleanings of stainless steel plates covered with press working oil by using ozone microbubble combined with ultrasound(28KHz, 45KHz or 100KHz, 100W) were investigated in water. Oil removal efficiencies of the sample plates were investigated by using a microscope and a waterdrop contact angle measurering apparatus. From experimental results, effective removals of press working oil from the surfaces of the sample plates by the investigated cleaning mehod were shown to be achieved under the following conditions: ultrasound, 45kHz(100W); ozone concentration, 1.15 mg/L; washing time, 15 min.