Horn-type ultrasonic generators have been frequently used for processing of materials in emulsification, particle dispersion and sonochemical reactions. Cavitation plays a significant role in the processing; however, it would bring about the concern of contamination due to cavitation erosion of the horn material. Some researchers point out the occurrence of micrometer sized particle. In the present study, the formation of finer particles was studied by using optical analyzers to measure nanometer sized particles. For various input energies, particle size distribution was analyzed as well as the number densities. Formation of about 100 nm particles was detected and the number density increased with increasing the power input.