Abstract
PZT thick films with composition of Pb1+α(Zr0.5, Ti0.5)O3 were prepared by a spincoating method on ITO/Corning #1737 or Pt/Ti/SiO2/Si substrate. The coating-drying-heating procedure was repeated. As a result, thick films of about 7μm were obtained by 5 depositions. Before measurement of piezoelectricity of the PZT films, they were polled at 10kV/mm. The piezoelectric properties of the films were measured by a micro laser interferometer and lock-in amplifier. The value of d33 coefficient of the film on ITO/#1737 substrate was 50-220pm/V.
