Low Temperature Fabrication of PZT Thin Film by Adding Ultra-Fine Seed Particles Using Chemical Solution Deposition

Abstract

The combination of ultrafine seed particles and seeding layer on the substrate of the precursor of PbTiO₃ was applied to decrease the crystallization temperature of lead zirconate titanate (Pb(Zr_0.52Ti_0.48)O₃: PZT) thin film by chemical solution deposition(CSD). The starting solutions were Pb(CH₃COO)₂3H₂O, Ti(C₃H₇O)₄ and Zr(C₄H₉O)₄. Mixed solution with the composition of PbTiO₃ was partially hydrolyzed and stabilized by the coating of surfactant as seed particles with 10-30nm in diameter. The crystallization temperature of PZT thin film by the addition of the ultrafine seed particles and/or the seed layer on Pt surface decreased at 450°C. The combination of the addition of seed particles and seed layer to PZT solution enabled the good ferroelectrical property even at 475°C.