Nano Structured Thin-Film Pt Catalyst for Thermoelectric Hydrogen Gas Sensor

Abstract

The catalytic platinum thin film is the most important to characterize the thermoelectric hydrogen gas sensor and its catalytic activity depends both on the surface morphology and the thickness. The surface morphology of platinum film deposited by low r.f. sputtering power was demonstrated that the small particles with the diameter around 20nm agglomerate covering the whole surface. The catalytic activity concerned with the sensor property was also discussed.