Evaluation for fast response of resistive oxygen gas sensors based on cerium oxide fine particle

Abstract

Resistive oxygen sensors based on cerium oxide thick films with an average particle size of 100 nm were fabricated. Fast response of the oxygen sensor was evaluated by method of periodical change of oxygen partial pressure. Scince the amplitude of the output of the oxygen sensor was independent of frequency in the range of 0.1 to 4 Hz at 1173 K, it became clear that the response time at 1173 K was less than 0.25.