Abstract
We have prepared nitrogen doped TiO2 films by annealing TiO2 films in NH3 atmosphere, and have evaluated XPS, XRD, SEM, and zeta potential for these films. XPS results revealed that nitrogen was doped into substitutional sites of anatase type TiO2 lattice. As for the zeta potential, nitrogen doping induced the surface zeta potential to more negative. Isoelectric point of N-doped TiO2 (in terms of pH) was about 1.0, whereas that of TiO2 was 6.0. Further, in the present study, we also evaluated photocatalytic activities of these films.