Hardening processes of hafnia gel films by photo-irradiation

Toshikazu Nishide; Nariaki Noumi; Sawako Suzuki

doi:10.14853/pcersj.2002F.0.312.0

15th Fall Meeting of The Ceramic Society of Japan

DOI https://doi.org/10.14853/pcersj.2002F.0.312.0

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Host: The Ceramic Society of Japan

Hardening processes of hafnia gel films by photo-irradiation

Toshikazu Nishide, Nariaki Noumi, Sawako Suzuki

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Keywords: hafnia, photo-irradiation, hardening, sol-gel process, a hard film, a high-pressure mercury lamp

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Pages 312

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Abstract

Hardening processes of sol-gel derived hafnia gel films by UV-irradiation were investigated by temperature programmed desorption (TPD) and FTIR. The FTIR spectra of the films before and after the UV irradiation showed absorption peaks at 1595 and 1374 cm^-1, indicating that HCOO^-ions in the gel films coordinated to Hf ions. The TPD analysis of the gel films showed that H₂O and HCOO^-ions contained in the gel films even after UV-irradiation.

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