Analysis of firing processes of sol-gel derived titania films by thermal desorption spectroscopy

Takayuki Yabe; Toshikazu Nishide; Nobuyuki Miyabayashi; Makiko Sano

doi:10.14853/pcersj.2002F.0.313.0

15th Fall Meeting of The Ceramic Society of Japan

DOI https://doi.org/10.14853/pcersj.2002F.0.313.0

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Host: The Ceramic Society of Japan

Analysis of firing processes of sol-gel derived titania films by thermal desorption spectroscopy

Takayuki Yabe, Toshikazu Nishide, Nobuyuki Miyabayashi, Makiko Sano

Author information

Keywords: titania, temperature programmed desorption, firing process, sol-gel process, a thin films, TPD

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Pages 313

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Abstract

Firing processes of sol-gel derived titania films were investigated by temperature programmed desorption (TPD). The TPD analysis showed the evolutions of H₂O, NH₃, HCl and Cl from the gel film. Since H₂O evolved in the low temperature region, it was ascribed to the water absorbed on the gel film. The TPD curve of NH₃ generated from the NH₄⁺ion was observed under 260°C. HCl evolved under 300°C and Cl evolved in the temperature range of 50-1000°C.

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