Feasibility atudy on low temperature fabrication of ITO transparent conducting films: low temperature decomposition of dip-coating materials of indium carboxylates.

Tadashi Arii; Akira Kishi; Kunihiko Shimizu; Shigeyuki Seki; Yutaka Sawada

doi:10.14853/pcersj.2002F.0.326.0

15th Fall Meeting of The Ceramic Society of Japan

DOI https://doi.org/10.14853/pcersj.2002F.0.326.0

Conference information

Host: The Ceramic Society of Japan

Feasibility atudy on low temperature fabrication of ITO transparent conducting films:

low temperature decomposition of dip-coating materials of indium carboxylates.

Tadashi Arii, Akira Kishi, Kunihiko Shimizu, Shigeyuki Seki, Yutaka Sawada

Author information

Keywords: ITO film, low temperature fabrication, humidity, XRD-DSC, TG-MS

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 326

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Abstract

Thermal decomposition process of indium carboxylates in dry gas and high humidity atmospheres was investigated by using TG-DTA-MS and XRD-DSC coupled with humidity generator. Crystalline indium oxide was obtained below 3000°C in high humidity atmosphere.

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