Structure and electric characterization of MgxZn1-xO thin films which added Al by the PLD method

Haruki Ryoken; Yutaka Adachi; Isao Sakaguchi; Naoki Ohashi; Hajime Haneda; Tadashi Takenaka

doi:10.14853/pcersj.2002F.0.335.0

15th Fall Meeting of The Ceramic Society of Japan

DOI https://doi.org/10.14853/pcersj.2002F.0.335.0

Conference information

Host: The Ceramic Society of Japan

Structure and electric characterization of Mg_xZn_1-xO thin films which added Al by the PLD method

Haruki Ryoken, Yutaka Adachi, Isao Sakaguchi, Naoki Ohashi, Hajime Haneda, Tadashi Takenaka

Author information

Keywords: Pulsed Laser Deposition method, Alumina, Magnesium, Bandgap, Superlattice

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 335

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Abstract

ZnO/(Zn, Mg, Al)O modulated structures were synthesized on A-phase of sapphire by pulsed laser deposition. X-ray diffraction measurement revealed that the grown films had superlattice structure as designed.

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