Single Crystalline Thin Films of Natural Superlattice Oxide, InGaO₃(ZnO)_m, Grown by Instant Solid-Phase Epitaxy(I)

Abstract

We found a magical way to grow single-crystalline film of natural superlattice oxides, named “Reactive Solid-Phase Epitaxy Method”. The method is very unique and easy way using an atmospheric oven. Almost perfect single-crystalline superlattice films are grown self-assembly by heating of a bi-layered structure deposited on a substrate, which is composed of an extremely thin (∼2nm^†) epitaxial layer and a thick (∼150nm^†) randomly-oriented polycrystalline layer of a natural superlattice oxide, in an atmospheric oven. In this paper, we demonstrate the capability of the present method. We chose homologous compound of InGaO₃(ZnO)_m (m=integer) as an example of complex oxides with natural superlattice structure.