Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
15th Fall Meeting of The Ceramic Society of Japan
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Host: The Ceramic Society of Japan

Growth of ZnO films by pulsed laser deposition using NO2
Yutaka Adachi, Haruki Ryouken, Isao Sakaguchi, Naoki Ohashi, Hajime Haneda, Tadashi Takenaka
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Keywords: Zinc Oxide, PLD, ceramics integration, NO2, Hall measurement, SIMS
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Pages 338

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Abstract
ZnO thin films were fabricated on sapphire substrates by pulsed laser deposition using NO2 as oxidant. With increasing growth temperature, the FWHM values of ω scan decrease. ZnO films grown in NO2 showed low carrier concentration when compared to the films grown in O2 atmosphere.
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© The Ceramic Society of Japan 2002
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