Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
15th Fall Meeting of The Ceramic Society of Japan
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Host: The Ceramic Society of Japan

Electrical properties of YSZ film prepared by MOCVD on piezoelectric actuator
Hiroshi Masumoto, Takashi Goto
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Keywords: Yttria-stabilized zirconia, electrical property, vibration, piezoelectric, A.C. impedance
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 353

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Abstract
Yttria-stabilized zirconia (YSZ) films were prepared by MOCVD using Zr(dpm)4, Y(dpm)3 and O2 gas, and placed on a PZT piezoelectric actuator. The effect of piezoelectric vibration on the ionic conduction of YSZ was studied at room temperature. The ionic conductivity of YSZ films with the vibration by the actuator increased with increasing the amplitude of vibration.
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© The Ceramic Society of Japan 2002
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