Abstract
The fixed small incident angle of the X-ray beam in the thin film diffraction condition contributes to a shallow X-ray penetration depth into the coating layer, and the signals from the layer can be efficiently detected in comparision to signals from the substrate. Moreover, the independent peak patterns of inside layer were considered to be obtained by an extension of TF-XRD method. The bio-functional HAp coating had been applied to this method, and then the less crystallinity was revealed in the inside layer of the coating near the substrate compared to the surface layer. The broad peaks were observed at the higher incident angles, and independent peak pattern of the inside layer was obtained by the subtraction the peaks of the shallow layer.
