Abstract
The oxide films were obtained by an atmospheric chemical-vapor-deposition (CVD) method, Relatively high reaction temperature was required for formation of the oxide films. In this study, we tried the synthesis of titania films using the CVD method assisted by the surface discharge. The films were evaluated using FT-IR and Raman spectroscopy. The shiny films were obtained using this method. The infrared absorption at the wave number in the range of 3500cm-1 can be assigned to the stretching vibration mode of -OH. The absorption obtained from the sample deposited by this method was lower than that formed by the thermal CVD method. The polymerization of the structure of TiO2 progresses by assist of by the surface discharge.
