Application of Al2O3 layer to Electrostatic chucks using Aerosol Deposition Method

Takayuki Ide; Tomokazu Ito; Hironori Hatono; Masakatsu Kiyohara; Levedev Maxim; Jun Akedo

doi:10.14853/pcersj.2002F.0.428.0

15th Fall Meeting of The Ceramic Society of Japan

DOI https://doi.org/10.14853/pcersj.2002F.0.428.0

Conference information

Host: The Ceramic Society of Japan

Application of Al₂O₃ layer to Electrostatic chucks using Aerosol Deposition Method

Takayuki Ide, Tomokazu Ito, Hironori Hatono, Masakatsu Kiyohara, Levedev Maxim, Jun Akedo

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Keywords: Alumina, Aerosol Deposition Method, electrostatic energy, layer, dielectric, adsorption property

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 428

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Abstract

The aerosol deposition method is one of a good fabrication method for ceramics layers, which is on the order of μm. In order to put to practical use electrostatic chucks, an α-Al₂O₃ layer was produced by the Aerosol Deposition Method. The produced layer has excellent property. Therefore we considered that the layer produced by this method was the good material as a electrostatic chucks.

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