Formation Mechanism of Ceramics Thin Film in Aerosol Deposition Method (3rd report) —Influence of substrate heating to microstructure of deposited Layer—

Tomokazu Ito; Jun Akedo; Levedev Maxim; Hironori Hatono; Masakatsu Kiyohara

doi:10.14853/pcersj.2002F.0.429.0

15th Fall Meeting of The Ceramic Society of Japan

DOI https://doi.org/10.14853/pcersj.2002F.0.429.0

Conference information

Host: The Ceramic Society of Japan

Formation Mechanism of Ceramics Thin Film in Aerosol Deposition Method (3rd report)

—Influence of substrate heating to microstructure of deposited Layer—

Tomokazu Ito, Jun Akedo, Levedev Maxim, Hironori Hatono, Masakatsu Kiyohara

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Keywords: Lead Zirconate Titanate, Alumina, dielectric, Aerosol Deposition Method, mechanochemical reaction, nano crystal, dynamic compaction

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 429

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Abstract

The influence of substrates heating to microstructure of the layer prepared by aerosol deposition method was investigated. In this method, high dense layers could be fabricated at normal temperature. Heating substrates decreased density of the layer, and no layers were fabricated at 700°C, which were unique phenomenon, compared with other conventional methods.

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