Preparation of (Y, Yb)MnO₃/Insulator/Si by chemical solution deposition

Abstract

Thin films of (Y,Yb)MnO₃ and Y₂O₃ have been prepared using metal alkoxides. Y₂O₃ thin films synthesized on Si(111) substrate had (111) orientation and smooth surfaces. (Y,Yb)MnO₃ thin films crystallized on Y₂O₃/Si substrate in Ar had high crystallinity and c-axis orientation. The atmosphere dependence of surface morphology was smaller than that for the films crystallized on Pt electrode. The films consisted of uniform grains and had smooth surfaces.