Preparation and semiconductive properties of Nd-doped-SrTiO3 polycrystalline thin film by MOCVD

Atsushi Nagato; Naoki Wakiya; Kazuo Sinozaki; Nobuyasu Mizutani

doi:10.14853/pcersj.2002F.0.483.0

15th Fall Meeting of The Ceramic Society of Japan

DOI https://doi.org/10.14853/pcersj.2002F.0.483.0

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Host: The Ceramic Society of Japan

Preparation and semiconductive properties of Nd-doped-SrTiO₃ polycrystalline thin film by MOCVD

Atsushi Nagato, Naoki Wakiya, Kazuo Sinozaki, Nobuyasu Mizutani

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Keywords: strontium titanate, metal organic chemical vapor deposition, thin film, semiconductive properties, polycrystalline, doping

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 483

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Abstract

Nb-doped SrTiO₃ thin films have been fabricated on LaAlO₃ (100), Silica glass and Yttria stabilized zirconia (YSZ) substrates by the MOCVD technique. The effect of the oxygen partial pressure and the deposition temperature on the film properties such as surface roughness, lattice constants and film composition has been investigated. Furthermore, effects of oxygen vacancy or impurity doping on electrical properties were investigated for Nb doped SrTiO₃ thin film, and the mechanism was discussed.

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